fig1

Towards deterministic and functional atomic manufacturing with electron beams

Figure 1. (A) Schematics and images showing the effect of a periodic beam motion on CrSBr crystal with a frequency of 0.5 kHz for 1 s in two directions. Cr atoms are displaced into the van der Waals gap, creating a Cr interstitial and a Cr vacancy at each layer of the crystal; (B) Three-dimensional mesoscopic defect crystal consisting of 79 × 58 locations in a volume of 150 nm × 100 nm × 13 nm. Diffraction pattern on the bottom right shows sharp superlattice Bragg reflections (inset) revealing the periodically modulated crystal-scale superstructure, indicating mesoscale order. Scale bars in the lower and higher magnification images are 0.1 μm and 2 nm, respectively. This figure reproduced from[1], Copyright 2026 Springer Nature.

Microstructures
ISSN 2770-2995 (Online)

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