fig5

Advances in micro/nano-engineered flexible sensor arrays for intelligent human-machine interaction

Figure 5. Fabrication strategies of high-density sensor arrays. (A) 784 units/100 cm2 density sensor array. Reproduced with permission[27]. Copyright 2023 AAAS; (B) 1,024 units sensor array. Reproduced with permission[92]. Copyright 2024 Elsevier; (C) 64 dots/cm2 sensor array. Reproduced with permission[28]. Copyright 2024 Wiley-VCH; (D) 100 pixels/cm2 sensor array. Reproduced with permission[29]. Copyright 2024 Springer Nature. PDMS: Polydimethylsiloxane; CNT: carbon nanotube; GNW: graphene nanowall; PECVD: plasma-enhanced chemical vapor deposition; PVA: polyvinyl alcohol; IPA: isopropyl alcohol; FPC: flexible printed circuit; ALD: atomic layer deposition.

Soft Science
ISSN 2769-5441 (Online)
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